High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers

Francis Torres, P. Meng, Li Ju, Chunnong Zhao, David Blair, K.-Y. Liu, S. Chao, Mariusz Martyniuk, I. Roch-Jeune, R. Flaminio, C. Michel

    Research output: Contribution to journalArticlepeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)014506-1 - 014506-6
    JournalJournal of Applied Physics
    Publication statusPublished - 2013

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