Helium Ion Microscope

L. Scipioni, L.A. Stern, J. Notte, S. Sijbrandij, Brendan Griffin

Research output: Contribution to journalArticle

51 Citations (Scopus)
188 Downloads (Pure)

Abstract

This article discusses the technological developments in the Orion helium ion microscope. This device, which uses a helium field ion gun to increase the detection of surface details at a sub-nanometer level, was developed by helium ion microscope manufacturer SMT Inc. The level of detail possible with helium ions is compared with the levels available from scanning electron microscopes.
Original languageEnglish
Pages (from-to)27-30
JournalAdvanced Materials & Processes
Volume166
Issue number6
Publication statusPublished - 2008

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