Helium Ion Microscope

L. Scipioni, L.A. Stern, J. Notte, S. Sijbrandij, Brendan Griffin

Research output: Contribution to journal › Article

51 Citations (Scopus)
188 Downloads (Pure)

Abstract

This article discusses the technological developments in the Orion helium ion microscope. This device, which uses a helium field ion gun to increase the detection of surface details at a sub-nanometer level, was developed by helium ion microscope manufacturer SMT Inc. The level of detail possible with helium ions is compared with the levels available from scanning electron microscopes.
Original languageEnglish
Pages (from-to)27-30
JournalAdvanced Materials & Processes
Volume166
Issue number6
Publication statusPublished - 2008

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    Copyright 2008 ASM International. This paper was published in Advanced Materials & Processes, Vol. 166, Issue 6, pp. 27-30 and is made available as an electronic reprint with the permission of ASM International. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplications of any material in this paper for a fee or for commercial purposes, or modification of the content of this paper are prohibited Link to Publisher's website supplied in Alternative Location.

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