@inproceedings{264b7b02b5cc41e498d764221e0e1150,
title = "Extended Tuning Range Fabry-Perot Etalon with Doubly-Supported Beam Actuators",
author = "Jason Milne and John Dell and Adrian Keating and Lorenzo Faraone",
year = "2006",
language = "English",
isbn = "078039562X",
volume = "Not applicable",
pages = "134--135",
booktitle = "Proceedings of the 2006 IEEE/LEOS International Conference on Optical MEMs and Their Applications",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
address = "United States",
edition = "Big Sky, Montana, USA",
note = "Extended Tuning Range Fabry-Perot Etalon with Doubly-Supported Beam Actuators ; Conference date: 01-01-2006",
}