Evaluation of Flaw Size Distributions Responsible for Size Effects in Strength of Small-Scale MEMS Specimens

Engineering

• Beam Specimen 33%
• Experimental Observation 33%
• Fabrication Method 33%
• Limitations 33%
• Microelectromechanical System 100%
• Physical Size 33%
• Processing Technique 33%
• Silicon Single Crystal 33%
• Size Effect 100%
• Structural Integrity 33%
• Tensile Specimen 33%
• Weibull Strength 33%

Material Science

• Microelectromechanical System 100%
• Silicon 33%
• Single Crystal 33%
• Surface (Surface Science) 33%
• Surface Flaw 33%
• Weibull Distribution 33%