Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films

H. Huang, K. Winchester, Jarek Antoszewski, Thuyen Nguyen, Mariusz Martyniuk, B. Walmsley, Yinong Liu, Xiao Hu, Charles Musca, John Dell, Lorenzo Faraone

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publicationStructural Integrity and Fracture Proceedings of the International Conference SIF 2004
Place of PublicationAustralia
PublisherAustralian Fracture Group Inc.
Pages149-154
Volume1
EditionBrisbane, Australia
ISBN (Print)1864997605
Publication statusPublished - 2004
EventEvaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films - Brisbane, Australia
Duration: 1 Jan 2004 → …

Conference

ConferenceEvaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films
Period1/01/04 → …

Cite this

Huang, H., Winchester, K., Antoszewski, J., Nguyen, T., Martyniuk, M., Walmsley, B., ... Faraone, L. (2004). Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films. In Structural Integrity and Fracture Proceedings of the International Conference SIF 2004 (Brisbane, Australia ed., Vol. 1, pp. 149-154). Australia: Australian Fracture Group Inc..