Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films

H. Huang, K. Winchester, Jarek Antoszewski, Thuyen Nguyen, Mariusz Martyniuk, B. Walmsley, Yinong Liu, Xiao Hu, Charles Musca, John Dell, Lorenzo Faraone

    Research output: Chapter in Book/Conference paperConference paper

    Original languageEnglish
    Title of host publicationStructural Integrity and Fracture Proceedings of the International Conference SIF 2004
    Place of PublicationAustralia
    PublisherAustralian Fracture Group Inc.
    Pages149-154
    Volume1
    EditionBrisbane, Australia
    ISBN (Print)1864997605
    Publication statusPublished - 2004
    EventEvaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films - Brisbane, Australia
    Duration: 1 Jan 2004 → …

    Conference

    ConferenceEvaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films
    Period1/01/04 → …

    Cite this

    Huang, H., Winchester, K., Antoszewski, J., Nguyen, T., Martyniuk, M., Walmsley, B., ... Faraone, L. (2004). Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films. In Structural Integrity and Fracture Proceedings of the International Conference SIF 2004 (Brisbane, Australia ed., Vol. 1, pp. 149-154). Australia: Australian Fracture Group Inc..
    Huang, H. ; Winchester, K. ; Antoszewski, Jarek ; Nguyen, Thuyen ; Martyniuk, Mariusz ; Walmsley, B. ; Liu, Yinong ; Hu, Xiao ; Musca, Charles ; Dell, John ; Faraone, Lorenzo. / Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films. Structural Integrity and Fracture Proceedings of the International Conference SIF 2004. Vol. 1 Brisbane, Australia. ed. Australia : Australian Fracture Group Inc., 2004. pp. 149-154
    @inproceedings{d07cb7f9db704e608f5db072ed124c5d,
    title = "Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films",
    author = "H. Huang and K. Winchester and Jarek Antoszewski and Thuyen Nguyen and Mariusz Martyniuk and B. Walmsley and Yinong Liu and Xiao Hu and Charles Musca and John Dell and Lorenzo Faraone",
    year = "2004",
    language = "English",
    isbn = "1864997605",
    volume = "1",
    pages = "149--154",
    booktitle = "Structural Integrity and Fracture Proceedings of the International Conference SIF 2004",
    publisher = "Australian Fracture Group Inc.",
    edition = "Brisbane, Australia",

    }

    Huang, H, Winchester, K, Antoszewski, J, Nguyen, T, Martyniuk, M, Walmsley, B, Liu, Y, Hu, X, Musca, C, Dell, J & Faraone, L 2004, Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films. in Structural Integrity and Fracture Proceedings of the International Conference SIF 2004. Brisbane, Australia edn, vol. 1, Australian Fracture Group Inc., Australia, pp. 149-154, Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films, 1/01/04.

    Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films. / Huang, H.; Winchester, K.; Antoszewski, Jarek; Nguyen, Thuyen; Martyniuk, Mariusz; Walmsley, B.; Liu, Yinong; Hu, Xiao; Musca, Charles; Dell, John; Faraone, Lorenzo.

    Structural Integrity and Fracture Proceedings of the International Conference SIF 2004. Vol. 1 Brisbane, Australia. ed. Australia : Australian Fracture Group Inc., 2004. p. 149-154.

    Research output: Chapter in Book/Conference paperConference paper

    TY - GEN

    T1 - Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films

    AU - Huang, H.

    AU - Winchester, K.

    AU - Antoszewski, Jarek

    AU - Nguyen, Thuyen

    AU - Martyniuk, Mariusz

    AU - Walmsley, B.

    AU - Liu, Yinong

    AU - Hu, Xiao

    AU - Musca, Charles

    AU - Dell, John

    AU - Faraone, Lorenzo

    PY - 2004

    Y1 - 2004

    M3 - Conference paper

    SN - 1864997605

    VL - 1

    SP - 149

    EP - 154

    BT - Structural Integrity and Fracture Proceedings of the International Conference SIF 2004

    PB - Australian Fracture Group Inc.

    CY - Australia

    ER -

    Huang H, Winchester K, Antoszewski J, Nguyen T, Martyniuk M, Walmsley B et al. Evaluation of elastic modulus and stress gradient of PECVD silicon nitride thin films. In Structural Integrity and Fracture Proceedings of the International Conference SIF 2004. Brisbane, Australia ed. Vol. 1. Australia: Australian Fracture Group Inc. 2004. p. 149-154