Equipment Design and Control of Advanced Thermal-Processing Module in Lithography

A. Tay, Hui Chua, Y.H. Wang, Y.S. Ngo

Research output: Contribution to journalArticle

14 Citations (Scopus)
Original languageEnglish
Pages (from-to)1112-1119
JournalIEEE Transactions on Industrial Electronics
Volume57
DOIs
Publication statusPublished - 2010

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