Effect of thermal annealing on stress relaxation and crystallisation of ion beam sputtered amorphous Si_1-xGe_x thin films

F. Guo, M. Martyniuk, D. Silva, Y. Liu, K. Brookshire, L. Faraone

Research output: Contribution to journal › Article › peer-review

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Ultra-high resolution dual beam facility for 3D imaging, nanoprototyping, and site-specific characterisation in the geo-, bio-, and physical sciences, and engineering
Sampson, D. (Investigator 01), Collin, S. (Investigator 02), Hill, M. (Investigator 03), Liu, Y. (Investigator 04), Saunders, M. (Investigator 05), Reddy, S. (Investigator 06), Benedix, G. (Investigator 07) & Buckley, C. (Investigator 08)
ARC Australian Research Council , CSIRO, Curtin University, Edith Cowan University, Murdoch University, University of Sydney
1/01/15 → 31/12/15
Project: Research
Silicon-germanium-carbon - a novel opto-mechanic material for optical micro-electromechanical systems
Faraone, L. (Investigator 01), Martyniuk, M. (Investigator 02), Liu, Y. (Investigator 03) & Keating, A. (Investigator 04)
ARC Australian Research Council
1/01/14 → 31/03/17
Project: Research