Effect of heat treatment on internal stresses in PECVD SiN xHy thin films

Yimeng Yang, Yinong Liu, John M. Delf

    Research output: Chapter in Book/Conference paperConference paperpeer-review

    4 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Effect of heat treatment on internal stresses in PECVD SiN xHy thin films'. Together they form a unique fingerprint.

    Physics

    Material Science