Effect of FIB milling on MEMS SOI Cantilevers

Venkatesh Chenniappan, P.P. Singh, M. Renilkumar, M. Varma, N. Bhat, R. Pratap, Mariusz Martyniuk, Adrian Keating, Gilberto A. Umana Membreno, Dilusha Silva, John Dell, Lorenzo Faraone

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

2 Citations (Scopus)

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Material Science