Dry polyimide etching with controlled sidewall profile for microelectromechanical systems

Research output: Contribution to conferenceAbstract

Original languageEnglish
Publication statusPublished - 2016
Event International Conference on Nanoscience and Nanotechnology (ICONN 2016) - Canberra, Australia
Duration: 7 Feb 201611 Feb 2016

Conference

Conference International Conference on Nanoscience and Nanotechnology (ICONN 2016)
CountryAustralia
CityCanberra
Period7/02/1611/02/16

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