Dry plasma technology for in-situ vacuum processing of HgCdTe infrared photodetectors

E.P.G. Smith, K.J. Winchester, Charles Musca, John Dell, Lorenzo Faraone

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publicationProceedings of 2000 International Semiconducting and Insulating Materials Conference (SIMC-XI)
Editors Jagadish, C. Welham, N.J.
Place of PublicationUSA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages318-321
Volume1
EditionCanberra, ACT, Australia
ISBN (Print)0780358147
Publication statusPublished - 2000
EventDry plasma technology for in-situ vacuum processing of HgCdTe infrared photodetectors - Canberra, ACT, Australia
Duration: 1 Jan 2000 → …

Conference

ConferenceDry plasma technology for in-situ vacuum processing of HgCdTe infrared photodetectors
Period1/01/00 → …

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