Dry plasma technology for in-situ vacuum processing of HgCdTe infrared photodetectors

E.P.G. Smith, K.J. Winchester, Charles Musca, John Dell, Lorenzo Faraone

Research output: Chapter in Book/Conference paperConference paperpeer-review

Original languageEnglish
Title of host publicationProceedings of 2000 International Semiconducting and Insulating Materials Conference (SIMC-XI)
Editors Jagadish, C. Welham, N.J.
Place of PublicationUSA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages318-321
Volume1
EditionCanberra, ACT, Australia
ISBN (Print)0780358147
Publication statusPublished - 2000
Event2000 International Semiconducting and Insulating Materials Conference - Canberra, Australia
Duration: 3 Jul 20007 Jul 2000
https://ieeexplore.ieee.org/document/939185

Conference

Conference2000 International Semiconducting and Insulating Materials Conference
Abbreviated titleSIMC-XI
Country/TerritoryAustralia
CityCanberra
Period3/07/007/07/00
Internet address

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