@inproceedings{0cdc83288f8940ab80dc6a05b9586da1,
title = "Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons",
author = "Jason Milne and A. Mittal and John Dell and Adrian Keating and Lorenzo Faraone",
year = "2007",
language = "English",
isbn = "1424405785",
volume = "CD Rom",
pages = "220--223",
editor = "Lorenzo Faraone and Sabine Betts and John Dell and Charles Musca and Brett Nener and Gia Parish and Justin Wehner",
booktitle = "COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
address = "United States",
edition = "Perth, Western Australia",
note = "Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons ; Conference date: 01-01-2007",
}