Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons

Jason Milne, A. Mittal, John Dell, Adrian Keating, Lorenzo Faraone

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publicationCOMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices
EditorsLorenzo Faraone, Sabine Betts, John Dell, Charles Musca, Brett Nener, Gia Parish, Justin Wehner
Place of PublicationUnited States of America
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages220-223
VolumeCD Rom
EditionPerth, Western Australia
ISBN (Print)1424405785
Publication statusPublished - 2007
EventDoubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons - Perth, Western Australia
Duration: 1 Jan 2007 → …

Conference

ConferenceDoubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons
Period1/01/07 → …

Cite this

Milne, J., Mittal, A., Dell, J., Keating, A., & Faraone, L. (2007). Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons. In L. Faraone, S. Betts, J. Dell, C. Musca, B. Nener, G. Parish, & J. Wehner (Eds.), COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices (Perth, Western Australia ed., Vol. CD Rom, pp. 220-223). IEEE, Institute of Electrical and Electronics Engineers.