Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons

Jason Milne; A. Mittal; John Dell; Adrian Keating; Lorenzo Faraone

Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons

Jason Milne, A. Mittal, John Dell, Adrian Keating, Lorenzo Faraone

Research output: Chapter in Book/Conference paper › Conference paper

Original language	English
Title of host publication	COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices
Editors	Lorenzo Faraone, Sabine Betts, John Dell, Charles Musca, Brett Nener, Gia Parish, Justin Wehner
Place of Publication	United States of America
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	220-223
Volume	CD Rom
Edition	Perth, Western Australia
ISBN (Print)	1424405785
Publication status	Published - 2007
Event	Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons - Perth, Western Australia Duration: 1 Jan 2007 → …

Conference

Conference	Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons
Period	1/01/07 → …

Cite this

Milne, J., Mittal, A., Dell, J., Keating, A., & Faraone, L. (2007). Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons. In L. Faraone, S. Betts, J. Dell, C. Musca, B. Nener, G. Parish, & J. Wehner (Eds.), COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices (Perth, Western Australia ed., Vol. CD Rom, pp. 220-223). IEEE, Institute of Electrical and Electronics Engineers.

Milne, Jason ; Mittal, A. ; Dell, John ; Keating, Adrian ; Faraone, Lorenzo. / Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons. COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. editor / Lorenzo Faraone ; Sabine Betts ; John Dell ; Charles Musca ; Brett Nener ; Gia Parish ; Justin Wehner. Vol. CD Rom Perth, Western Australia. ed. United States of America : IEEE, Institute of Electrical and Electronics Engineers, 2007. pp. 220-223

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title = "Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons",

author = "Jason Milne and A. Mittal and John Dell and Adrian Keating and Lorenzo Faraone",

year = "2007",

language = "English",

isbn = "1424405785",

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pages = "220--223",

editor = "Lorenzo Faraone and Sabine Betts and John Dell and Charles Musca and Brett Nener and Gia Parish and Justin Wehner",

booktitle = "COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States",

edition = "Perth, Western Australia",

note = "Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons ; Conference date: 01-01-2007",

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Milne, J, Mittal, A, Dell, J , Keating, A & Faraone, L 2007, Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons. in L Faraone, S Betts, J Dell, C Musca, B Nener, G Parish & J Wehner (eds), COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. Perth, Western Australia edn, vol. CD Rom, IEEE, Institute of Electrical and Electronics Engineers, United States of America, pp. 220-223, Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons, 1/01/07.

Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons. / Milne, Jason; Mittal, A.; Dell, John ; Keating, Adrian ; Faraone, Lorenzo.

COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. ed. / Lorenzo Faraone; Sabine Betts; John Dell; Charles Musca; Brett Nener; Gia Parish; Justin Wehner. Vol. CD Rom Perth, Western Australia. ed. United States of America : IEEE, Institute of Electrical and Electronics Engineers, 2007. p. 220-223.

Research output: Chapter in Book/Conference paper › Conference paper

TY - GEN

T1 - Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons

AU - Milne, Jason

AU - Mittal, A.

AU - Dell, John

AU - Keating, Adrian

AU - Faraone, Lorenzo

PY - 2007

Y1 - 2007

M3 - Conference paper

SN - 1424405785

VL - CD Rom

SP - 220

EP - 223

BT - COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices

A2 - Faraone, Lorenzo

A2 - Betts, Sabine

A2 - Dell, John

A2 - Musca, Charles

A2 - Nener, Brett

A2 - Parish, Gia

A2 - Wehner, Justin

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - United States of America

T2 - Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons

Y2 - 1 January 2007

ER -

Milne J, Mittal A, Dell J , Keating A , Faraone L. Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons. In Faraone L, Betts S, Dell J, Musca C, Nener B, Parish G, Wehner J, editors, COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. Perth, Western Australia ed. Vol. CD Rom. United States of America: IEEE, Institute of Electrical and Electronics Engineers. 2007. p. 220-223