Development of an Alkaline-Compatible Porous-Silicon Photolithographic Process

M Lai, Giacinta Parish, Y. Liu, John Dell, A.J. Keating

Research output: Contribution to journalArticle

26 Citations (Scopus)
Original languageEnglish
Pages (from-to)418-423
JournalIEEE Journal of Microelectromechanical Systems
Volume20
Issue number2
DOIs
Publication statusPublished - 2011

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