Determination of mechanical properties of silicon nitride thin films using nanoindentation

Mariusz Martyniuk; Jarek Antoszewski; B.A. Walmsley; Charles Musca; John Dell; Y.G. Jung; B.R. Lawn; H. Huang; Lorenzo Faraone

Determination of mechanical properties of silicon nitride thin films using nanoindentation

Mariusz Martyniuk, Jarek Antoszewski, B.A. Walmsley, Charles Musca, John Dell, Y.G. Jung, B.R. Lawn, H. Huang, Lorenzo Faraone

Graduate Research School

Research output: Chapter in Book/Conference paper › Conference paper

18 Citations (Scopus)

Original language	English
Title of host publication	Proceeding of SPIE: Spaceborne Sensors II
Editors	Peter Tchoryk, Jr, Brian Holz
Place of Publication	United States
Publisher	SPIE
Pages	216-225
Volume	5798
Edition	Orlando, Florida, USA
ISBN (Print)	0819457833
Publication status	Published - 2005
Event	Determination of mechanical properties of silicon nitride thin films using nanoindentation - Orlando, Florida, USA Duration: 1 Jan 2005 → …

Conference

Conference	Determination of mechanical properties of silicon nitride thin films using nanoindentation
Period	1/01/05 → …

Cite this

@inproceedings{b371521ac51341389fb5df44ee0a66a5,

title = "Determination of mechanical properties of silicon nitride thin films using nanoindentation",

author = "Mariusz Martyniuk and Jarek Antoszewski and B.A. Walmsley and Charles Musca and John Dell and Y.G. Jung and B.R. Lawn and H. Huang and Lorenzo Faraone",

year = "2005",

language = "English",

isbn = "0819457833",

volume = "5798",

pages = "216--225",

editor = "Peter Tchoryk and Jr and Brian Holz",

booktitle = "Proceeding of SPIE: Spaceborne Sensors II",

publisher = "SPIE",

address = "United States",

edition = "Orlando, Florida, USA",

note = "Determination of mechanical properties of silicon nitride thin films using nanoindentation ; Conference date: 01-01-2005",

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Martyniuk, M , Antoszewski, J, Walmsley, BA, Musca, C, Dell, J, Jung, YG, Lawn, BR, Huang, H & Faraone, L 2005, Determination of mechanical properties of silicon nitride thin films using nanoindentation. in P Tchoryk, Jr & B Holz (eds), Proceeding of SPIE: Spaceborne Sensors II. Orlando, Florida, USA edn, vol. 5798, SPIE, United States, pp. 216-225, Determination of mechanical properties of silicon nitride thin films using nanoindentation, 1/01/05.

Determination of mechanical properties of silicon nitride thin films using nanoindentation. / Martyniuk, Mariusz ; Antoszewski, Jarek; Walmsley, B.A. et al.
Proceeding of SPIE: Spaceborne Sensors II. ed. / Peter Tchoryk; Jr; Brian Holz. Vol. 5798 Orlando, Florida, USA. ed. United States: SPIE, 2005. p. 216-225.

Research output: Chapter in Book/Conference paper › Conference paper

TY - GEN

T1 - Determination of mechanical properties of silicon nitride thin films using nanoindentation

AU - Martyniuk, Mariusz

AU - Antoszewski, Jarek

AU - Walmsley, B.A.

AU - Musca, Charles

AU - Dell, John

AU - Jung, Y.G.

AU - Lawn, B.R.

AU - Huang, H.

AU - Faraone, Lorenzo

PY - 2005

Y1 - 2005

M3 - Conference paper

SN - 0819457833

VL - 5798

SP - 216

EP - 225

BT - Proceeding of SPIE: Spaceborne Sensors II

A2 - Tchoryk, Peter

A2 - Jr, null

A2 - Holz, Brian

PB - SPIE

CY - United States

T2 - Determination of mechanical properties of silicon nitride thin films using nanoindentation

Y2 - 1 January 2005

ER -