Design, modeling, and control of a large range 3-DOF micropositioning stage

Ammar Al-Jodah, Bijan Shirinzadeh, Mohammadali Ghafarian, Tilok Kumar Das, Joshua Pinskier

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)


The demand for large range three-degrees-of-freedom (3-DOF) micro/nanopositioning mechanisms has been increased recently for potential utilization in many applications. However, these mechanisms suffer from a large footprint and low motion accuracy, which severely affect their exploitation. In this paper, a compact mechanism is proposed to achieve a large workspace and a high motion accuracy. Leaf springs are adopted to realize a fully compliant mechanism and three Voice Coil Motors (VCMs) are used in actuation. The VCMs are enclosed within driving arms and the leaf springs are distributed in a multilevel design to improve the mechanism compactness. The analytical model is developed and a prototype is fabricated to examine statics, dynamics, and feedback performance. Moreover, a laser-based sensing approach is developed to capture the 3-DOF motion. Furthermore, a robust control technique is designed to improve tracking performance. Results show that this mechanism possesses a compact design with a large workspace. Also, high resolution and tracking performance are achieved.
Original languageEnglish
Article number104159
JournalMechanism and Machine Theory
Publication statusPublished - Feb 2021
Externally publishedYes


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