Design methodology and circuit techniques for the CMOS readout of MEMS flow sensors

Moaaz Ahmed

doi:10.26182/5c4aadb078a55

Design methodology and circuit techniques for the CMOS readout of MEMS flow sensors

Moaaz Ahmed

School of Engineering

Research output: Thesis › Doctoral Thesis

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Abstract

In this thesis, we present a systematic design methodology which explores the design space (for ultra-low noise chopper instrumentation amplifiers) in all regions of MOSFET operation. Our work is the first of its kind to extend the gm/I0 based design methodology for precision instrumentation amplifiers by taking into account a comprehensive set of parameters. The proposed approach was validated through the design of CMOS MEMS flow sensing system fully integrated on chip (SoC) that can sense N2 gas flow ranging from -26m/s to 26m/s (-50~50 seem) with measured sensitivity of up to 98mV/sccm.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	The University of Western Australia
Supervisors/Advisors	Boussaid, Farid, Supervisor Bermak, Amine, Supervisor Sreeram, Victor, Supervisor
Award date	4 Jan 2019
DOIs	https://doi.org/10.26182/5c4aadb078a55
Publication status	Unpublished - 2019

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10.26182/5c4aadb078a55

THESIS - DOCTOR OF PHILOSOPHY - AHMED Moaaz - 2019
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Cite this

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title = "Design methodology and circuit techniques for the CMOS readout of MEMS flow sensors",

abstract = "In this thesis, we present a systematic design methodology which explores the design space (for ultra-low noise chopper instrumentation amplifiers) in all regions of MOSFET operation. Our work is the first of its kind to extend the gm/I0 based design methodology for precision instrumentation amplifiers by taking into account a comprehensive set of parameters. The proposed approach was validated through the design of CMOS MEMS flow sensing system fully integrated on chip (SoC) that can sense N2 gas flow ranging from -26m/s to 26m/s (-50~50 seem) with measured sensitivity of up to 98mV/sccm. ",

keywords = "CMOS readout IC, CMOS MEMS flow sensor, Instrumentation amplifiers, Analog-to-digital convertor, Sensor interface circuits, gm/lo design methodology",

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language = "English",

school = "The University of Western Australia",

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AB - In this thesis, we present a systematic design methodology which explores the design space (for ultra-low noise chopper instrumentation amplifiers) in all regions of MOSFET operation. Our work is the first of its kind to extend the gm/I0 based design methodology for precision instrumentation amplifiers by taking into account a comprehensive set of parameters. The proposed approach was validated through the design of CMOS MEMS flow sensing system fully integrated on chip (SoC) that can sense N2 gas flow ranging from -26m/s to 26m/s (-50~50 seem) with measured sensitivity of up to 98mV/sccm.

KW - CMOS readout IC

KW - CMOS MEMS flow sensor

KW - Instrumentation amplifiers

KW - Analog-to-digital convertor

KW - Sensor interface circuits

KW - gm/lo design methodology

U2 - 10.26182/5c4aadb078a55

DO - 10.26182/5c4aadb078a55

M3 - Doctoral Thesis

ER -

Design methodology and circuit techniques for the CMOS readout of MEMS flow sensors

Abstract

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