Design and characterization of Fabry-Pérot MEMS-based short-wave infrared microspectrometers

Adrian Keating; Jarek Antoszewski; Dilusha Silva; K.J. Winchester; Thuyen Nguyen; John Dell; Charles Musca; Lorenzo Faraone; P. Mitra; J.D. Beck; M.R. Skokan; Julia Robinson; KKMBD Silva

doi:10.1007/s11664-008-0526-0

Design and characterization of Fabry-Pérot MEMS-based short-wave infrared microspectrometers

Adrian Keating, Jarek Antoszewski, Dilusha Silva, K.J. Winchester, Thuyen Nguyen, John Dell, Charles Musca, Lorenzo Faraone, P. Mitra, J.D. Beck, M.R. Skokan, Julia Robinson, KKMBD Silva

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Abstract

Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry-Perot filter and a Hg Cd-x(1-x) Te-based infrared detector are discussed and measured results presented. The microspectrometers are designed to operate in the 1.5 mu m to 2.6 mu m wavelength range. Design equations are presented which account for the mechanical and optical characteristics of the device. Measurements indicate linewidths as narrow as 55 nm, switching times of 40 mu s, and a tuning range of 380 nm, which is limited by snap-down. Optical characterization of the distributed Bragg mirrors and the Fabry-Perot filter are presented, and these are shown to be in good agreement with simple first-order analytical models. Bowing of the movable Fabry-Perot mirror due to stress gradients is identified as the dominant source of linewidth broadening.

Original language	English
Pages (from-to)	1811-1820
Journal	Journal of Electronic Materials
Volume	37
Issue number	12
DOIs	https://doi.org/10.1007/s11664-008-0526-0
Publication status	Published - 2008

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Keating, A., Antoszewski, J., Silva, D., Winchester, K. J., Nguyen, T., Dell, J., Musca, C., Faraone, L., Mitra, P., Beck, J. D., Skokan, M. R., Robinson, J., & Silva, KKMBD. (2008). Design and characterization of Fabry-Pérot MEMS-based short-wave infrared microspectrometers. Journal of Electronic Materials, 37(12), 1811-1820. https://doi.org/10.1007/s11664-008-0526-0

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title = "Design and characterization of Fabry-P{\'e}rot MEMS-based short-wave infrared microspectrometers",

abstract = "Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry-Perot filter and a Hg Cd-x(1-x) Te-based infrared detector are discussed and measured results presented. The microspectrometers are designed to operate in the 1.5 mu m to 2.6 mu m wavelength range. Design equations are presented which account for the mechanical and optical characteristics of the device. Measurements indicate linewidths as narrow as 55 nm, switching times of 40 mu s, and a tuning range of 380 nm, which is limited by snap-down. Optical characterization of the distributed Bragg mirrors and the Fabry-Perot filter are presented, and these are shown to be in good agreement with simple first-order analytical models. Bowing of the movable Fabry-Perot mirror due to stress gradients is identified as the dominant source of linewidth broadening.",

author = "Adrian Keating and Jarek Antoszewski and Dilusha Silva and K.J. Winchester and Thuyen Nguyen and John Dell and Charles Musca and Lorenzo Faraone and P. Mitra and J.D. Beck and M.R. Skokan and Julia Robinson and KKMBD Silva",

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TY - JOUR

T1 - Design and characterization of Fabry-Pérot MEMS-based short-wave infrared microspectrometers

AU - Keating, Adrian

AU - Antoszewski, Jarek

AU - Silva, Dilusha

AU - Winchester, K.J.

AU - Nguyen, Thuyen

AU - Dell, John

AU - Musca, Charles

AU - Faraone, Lorenzo

AU - Mitra, P.

AU - Beck, J.D.

AU - Skokan, M.R.

AU - Robinson, Julia

AU - Silva, KKMBD

PY - 2008

Y1 - 2008

N2 - Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry-Perot filter and a Hg Cd-x(1-x) Te-based infrared detector are discussed and measured results presented. The microspectrometers are designed to operate in the 1.5 mu m to 2.6 mu m wavelength range. Design equations are presented which account for the mechanical and optical characteristics of the device. Measurements indicate linewidths as narrow as 55 nm, switching times of 40 mu s, and a tuning range of 380 nm, which is limited by snap-down. Optical characterization of the distributed Bragg mirrors and the Fabry-Perot filter are presented, and these are shown to be in good agreement with simple first-order analytical models. Bowing of the movable Fabry-Perot mirror due to stress gradients is identified as the dominant source of linewidth broadening.

AB - Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry-Perot filter and a Hg Cd-x(1-x) Te-based infrared detector are discussed and measured results presented. The microspectrometers are designed to operate in the 1.5 mu m to 2.6 mu m wavelength range. Design equations are presented which account for the mechanical and optical characteristics of the device. Measurements indicate linewidths as narrow as 55 nm, switching times of 40 mu s, and a tuning range of 380 nm, which is limited by snap-down. Optical characterization of the distributed Bragg mirrors and the Fabry-Perot filter are presented, and these are shown to be in good agreement with simple first-order analytical models. Bowing of the movable Fabry-Perot mirror due to stress gradients is identified as the dominant source of linewidth broadening.

U2 - 10.1007/s11664-008-0526-0

DO - 10.1007/s11664-008-0526-0

M3 - Article

SN - 0361-5235

VL - 37

SP - 1811

EP - 1820

JO - Journal of Electronic Materials

JF - Journal of Electronic Materials

IS - 12

ER -

Design and characterization of Fabry-Pérot MEMS-based short-wave infrared microspectrometers

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