Design and characterization of Fabry-Pérot MEMS-based short-wave infrared microspectrometers

Adrian Keating, Jarek Antoszewski, Dilusha Silva, K.J. Winchester, Thuyen Nguyen, John Dell, Charles Musca, Lorenzo Faraone, P. Mitra, J.D. Beck, M.R. Skokan, Julia Robinson, KKMBD Silva

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)


Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry-Perot filter and a Hg Cd-x(1-x) Te-based infrared detector are discussed and measured results presented. The microspectrometers are designed to operate in the 1.5 mu m to 2.6 mu m wavelength range. Design equations are presented which account for the mechanical and optical characteristics of the device. Measurements indicate linewidths as narrow as 55 nm, switching times of 40 mu s, and a tuning range of 380 nm, which is limited by snap-down. Optical characterization of the distributed Bragg mirrors and the Fabry-Perot filter are presented, and these are shown to be in good agreement with simple first-order analytical models. Bowing of the movable Fabry-Perot mirror due to stress gradients is identified as the dominant source of linewidth broadening.
Original languageEnglish
Pages (from-to)1811-1820
JournalJournal of Electronic Materials
Issue number12
Publication statusPublished - 2008


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