Demonstration of a method for detecting MEMS suspended beam height

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Original language	English
Title of host publication	2012 International Conference on Optical MEMS and Nanophotonics (OMN)
Place of Publication	USA
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	91-92
Volume	30
ISBN (Print)	07338724
DOIs	https://doi.org/10.1109/OMEMS.2012.6318817
Publication status	Published - 2012
Event	2012 International Conference on Optical MEMS and Nanophotonics - Banff, Canada Duration: 6 Aug 2012 → 9 Aug 2012

Conference	2012 International Conference on Optical MEMS and Nanophotonics
Abbreviated title	OMN 2012
Country/Territory	Canada
City	Banff
Period	6/08/12 → 9/08/12

Access to Document

@inproceedings{0e8dc02d047643a9a773ab0d3c5bed57,

title = "Demonstration of a method for detecting MEMS suspended beam height",

author = "G. Putrino and Mariusz Martyniuk and Adrian Keating and Lorenzo Faraone and John Dell",

year = "2012",

doi = "10.1109/OMEMS.2012.6318817",

language = "English",

isbn = "07338724",

volume = "30",

pages = "91--92",

booktitle = "2012 International Conference on Optical MEMS and Nanophotonics (OMN)",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2012 International Conference on Optical MEMS and Nanophotonics , OMN 2012 ; Conference date: 06-08-2012 Through 09-08-2012",

}

Putrino, G, Martyniuk, M , Keating, A , Faraone, L & Dell, J 2012, Demonstration of a method for detecting MEMS suspended beam height. in 2012 International Conference on Optical MEMS and Nanophotonics (OMN). vol. 30, IEEE, Institute of Electrical and Electronics Engineers, USA, pp. 91-92, 2012 International Conference on Optical MEMS and Nanophotonics , Banff, Canada, 6/08/12. https://doi.org/10.1109/OMEMS.2012.6318817

TY - GEN

T1 - Demonstration of a method for detecting MEMS suspended beam height

AU - Putrino, G.

AU - Martyniuk, Mariusz

AU - Keating, Adrian

AU - Faraone, Lorenzo

AU - Dell, John

PY - 2012

Y1 - 2012

U2 - 10.1109/OMEMS.2012.6318817

DO - 10.1109/OMEMS.2012.6318817

M3 - Conference paper

SN - 07338724

VL - 30

SP - 91

EP - 92

BT - 2012 International Conference on Optical MEMS and Nanophotonics (OMN)

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - USA

T2 - 2012 International Conference on Optical MEMS and Nanophotonics

Y2 - 6 August 2012 through 9 August 2012

ER -