Demonstration of a method for detecting MEMS suspended beam height

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publication2012 International Conference on Optical MEMS and Nanophotonics (OMN)
Place of PublicationUSA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages91-92
Volume30
ISBN (Print)07338724
DOIs
Publication statusPublished - 2012
Event2012 International Conference on Optical MEMS and Nanophotonics - Banff, Canada
Duration: 6 Aug 20129 Aug 2012

Conference

Conference2012 International Conference on Optical MEMS and Nanophotonics
Abbreviated titleOMN 2012
CountryCanada
CityBanff
Period6/08/129/08/12

Cite this