Fingerprint
Dive into the research topics of 'Crystallization of silicon nitride thin films synthesized by plasma-enhanced chemical vapour deposition'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Crystallization of silicon nitride thin films synthesized by plasma-enhanced chemical vapour deposition
N Jehanathan, Martin Saunders, Y Liu, John Dell
Research output: Contribution to journal › Article › peer-review
15
Citations
(Scopus)