Cryogenic optical profilometry for the calculation of coefficient of thermal expansion in thin films

K.L. Brookshire; Ramin Rafiei; Mariusz Martyniuk; Dilusha Silva; John Bumgarner; Robert Basedow; Yinong Liu; Lorenzo Faraone

doi:10.1117/12.2033802

Cryogenic optical profilometry for the calculation of coefficient of thermal expansion in thin films

K.L. Brookshire, Ramin Rafiei, Mariusz Martyniuk, Dilusha Silva, John Bumgarner, Robert Basedow, Yinong Liu, Lorenzo Faraone

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Proceedings of SPIE Micro+Nano Materials, Devices, and Applications
Place of Publication	United States of America
Publisher	SPIE
Pages	8923V-1 - 89231V-6
Volume	8923
ISBN (Print)	0277786X
DOIs	https://doi.org/10.1117/12.2033802
Publication status	Published - 2013
Event	SPIE Micro+Nano Materials, Devices, and Applications 2013 Conference - Melbourne, Australia Duration: 8 Dec 2013 → 11 Dec 2013

Conference

Conference	SPIE Micro+Nano Materials, Devices, and Applications 2013 Conference
Country/Territory	Australia
City	Melbourne
Period	8/12/13 → 11/12/13

Access to Document

10.1117/12.2033802

Cite this

@inproceedings{48509b3471744aea84cbd064127bb8b1,

title = "Cryogenic optical profilometry for the calculation of coefficient of thermal expansion in thin films",

author = "K.L. Brookshire and Ramin Rafiei and Mariusz Martyniuk and Dilusha Silva and John Bumgarner and Robert Basedow and Yinong Liu and Lorenzo Faraone",

year = "2013",

doi = "10.1117/12.2033802",

language = "English",

isbn = "0277786X",

volume = "8923",

pages = "8923V--1 -- 89231V--6",

booktitle = "Proceedings of SPIE Micro+Nano Materials, Devices, and Applications",

publisher = "SPIE",

address = "United States",

note = "SPIE Micro+Nano Materials, Devices, and Applications 2013 Conference ; Conference date: 08-12-2013 Through 11-12-2013",

}

Brookshire, KL, Rafiei, R, Martyniuk, M , Silva, D, Bumgarner, J, Basedow, R, Liu, Y & Faraone, L 2013, Cryogenic optical profilometry for the calculation of coefficient of thermal expansion in thin films. in Proceedings of SPIE Micro+Nano Materials, Devices, and Applications. vol. 8923, SPIE, United States of America, pp. 8923V-1 - 89231V-6, SPIE Micro+Nano Materials, Devices, and Applications 2013 Conference, Melbourne, Victoria, Australia, 8/12/13. https://doi.org/10.1117/12.2033802

Cryogenic optical profilometry for the calculation of coefficient of thermal expansion in thin films. / Brookshire, K.L.; Rafiei, Ramin; Martyniuk, Mariusz et al.
Proceedings of SPIE Micro+Nano Materials, Devices, and Applications. Vol. 8923 United States of America: SPIE, 2013. p. 8923V-1 - 89231V-6.

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - Cryogenic optical profilometry for the calculation of coefficient of thermal expansion in thin films

AU - Brookshire, K.L.

AU - Rafiei, Ramin

AU - Martyniuk, Mariusz

AU - Silva, Dilusha

AU - Bumgarner, John

AU - Basedow, Robert

AU - Liu, Yinong

AU - Faraone, Lorenzo

PY - 2013

Y1 - 2013

U2 - 10.1117/12.2033802

DO - 10.1117/12.2033802

M3 - Conference paper

SN - 0277786X

VL - 8923

SP - 8923V-1 - 89231V-6

BT - Proceedings of SPIE Micro+Nano Materials, Devices, and Applications

PB - SPIE

CY - United States of America

T2 - SPIE Micro+Nano Materials, Devices, and Applications 2013 Conference

Y2 - 8 December 2013 through 11 December 2013

ER -