@inproceedings{31eb9f19c83f40d4905c8854d4ddaeb0,
title = "Control of Semiconductor Substrate Temperature Uniformity during Photoresist Processing in Lithography",
author = "A. Tay and Hui Chua and Y. Wang and G. Yang",
year = "2009",
language = "English",
isbn = "9788995605691",
volume = "1",
pages = "853--858",
editor = "Y. Hung and W. Su",
booktitle = "Proceedings of The 7th Asian Control Conference",
publisher = "Asian Control Association",
edition = "Hong Kong, China",
note = "Control of Semiconductor Substrate Temperature Uniformity during Photoresist Processing in Lithography ; Conference date: 01-01-2009",
}