Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon

Research output: Contribution to conferenceConference presentation/ephemera

Original languageEnglish
Publication statusPublished - 2018
EventAsia-Pacific Conference of Transducers and Micro-Nano Technology - Hong Kong , Hong Kong SAR, China
Duration: 24 Jun 201827 Jun 2018
https://apcot2018.ust.hk/

Conference

ConferenceAsia-Pacific Conference of Transducers and Micro-Nano Technology
CountryChina
CityHong Kong SAR
Period24/06/1827/06/18
Internet address

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