Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon

Research output: Contribution to conferenceConference presentation/ephemera

Original languageEnglish
Publication statusPublished - 2018
EventAsia-Pacific Conference of Transducers and Micro-Nano Technology - Hong Kong , Hong Kong SAR, China
Duration: 24 Jun 201827 Jun 2018
https://apcot2018.ust.hk/

Conference

ConferenceAsia-Pacific Conference of Transducers and Micro-Nano Technology
CountryChina
CityHong Kong SAR
Period24/06/1827/06/18
Internet address

Cite this

Afandi, Y., Sun, X., Parish, G., & Keating, A. (2018). Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon. Paper presented at Asia-Pacific Conference of Transducers and Micro-Nano Technology, Hong Kong SAR, China.
Afandi, Yaman ; Sun, Xiao ; Parish, Giacinta ; Keating, Adrian. / Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon. Paper presented at Asia-Pacific Conference of Transducers and Micro-Nano Technology, Hong Kong SAR, China.
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title = "Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon",
author = "Yaman Afandi and Xiao Sun and Giacinta Parish and Adrian Keating",
year = "2018",
language = "English",
note = "Asia-Pacific Conference of Transducers and Micro-Nano Technology ; Conference date: 24-06-2018 Through 27-06-2018",
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Afandi, Y, Sun, X, Parish, G & Keating, A 2018, 'Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon' Paper presented at Asia-Pacific Conference of Transducers and Micro-Nano Technology, Hong Kong SAR, China, 24/06/18 - 27/06/18, .

Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon. / Afandi, Yaman; Sun, Xiao; Parish, Giacinta; Keating, Adrian.

2018. Paper presented at Asia-Pacific Conference of Transducers and Micro-Nano Technology, Hong Kong SAR, China.

Research output: Contribution to conferenceConference presentation/ephemera

TY - CONF

T1 - Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon

AU - Afandi, Yaman

AU - Sun, Xiao

AU - Parish, Giacinta

AU - Keating, Adrian

PY - 2018

Y1 - 2018

M3 - Conference presentation/ephemera

ER -

Afandi Y, Sun X, Parish G, Keating A. Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon. 2018. Paper presented at Asia-Pacific Conference of Transducers and Micro-Nano Technology, Hong Kong SAR, China.