Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon

Research output: Contribution to conference › Conference presentation/ephemera

Original language	English
Publication status	Published - 2018
Event	Asia-Pacific Conference of Transducers and Micro-Nano Technology - Hong Kong , Hong Kong SAR, China Duration: 24 Jun 2018 → 27 Jun 2018 https://apcot2018.ust.hk/

Conference	Asia-Pacific Conference of Transducers and Micro-Nano Technology
Country/Territory	China
City	Hong Kong SAR
Period	24/06/18 → 27/06/18
Internet address	https://apcot2018.ust.hk/

Cite this

@conference{8bfce3d0d0e44bd3a64f3bf1813c440c,

title = "Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon",

author = "Yaman Afandi and Xiao Sun and Giacinta Parish and Adrian Keating",

year = "2018",

language = "English",

note = "Asia-Pacific Conference of Transducers and Micro-Nano Technology ; Conference date: 24-06-2018 Through 27-06-2018",

url = "https://apcot2018.ust.hk/",

}