Compositional and mechanical properties of PECVD silicon for thin-film optical applications

    Research output: Chapter in Book/Conference paperConference paper

    Original languageEnglish
    Title of host publicationCOMMAD 2012 PROCEEDINGS
    Place of PublicationUnited States
    PublisherIEEE, Institute of Electrical and Electronics Engineers
    Pages185-186
    Volume1
    ISBN (Print)9781467330459
    Publication statusPublished - 2012
    EventCompositional and mechanical properties of PECVD silicon for thin-film optical applications - The University of Melbourne Royal Melbourne Institute of Technology, Melbourne, Australia
    Duration: 1 Jan 2012 → …

    Conference

    ConferenceCompositional and mechanical properties of PECVD silicon for thin-film optical applications
    Period1/01/12 → …

    Cite this

    Tripathi, D. K., Mao, H., Silva, D., & Faraone, L. (2012). Compositional and mechanical properties of PECVD silicon for thin-film optical applications. In COMMAD 2012 PROCEEDINGS (Vol. 1, pp. 185-186). United States: IEEE, Institute of Electrical and Electronics Engineers.