Compositional and mechanical properties of PECVD silicon for thin-film optical applications

D.K. Tripathi; H. Mao; Dilusha Silva; Lorenzo Faraone

Compositional and mechanical properties of PECVD silicon for thin-film optical applications

D.K. Tripathi, H. Mao, Dilusha Silva, Lorenzo Faraone

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Original language	English
Title of host publication	COMMAD 2012 PROCEEDINGS
Place of Publication	United States
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	185-186
Volume	1
ISBN (Print)	9781467330459
Publication status	Published - 2012
Event	2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012 - Melbourne, VIC, Australia Duration: 12 Dec 2012 → 14 Dec 2012

Conference

Conference	2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012
Abbreviated title	COMMAD
Country/Territory	Australia
City	Melbourne, VIC
Period	12/12/12 → 14/12/12

Cite this

@inproceedings{4484f084f6c54d0983012d3f11b91b9a,

title = "Compositional and mechanical properties of PECVD silicon for thin-film optical applications",

author = "D.K. Tripathi and H. Mao and Dilusha Silva and Lorenzo Faraone",

year = "2012",

language = "English",

isbn = "9781467330459",

volume = "1",

pages = "185--186",

booktitle = "COMMAD 2012 PROCEEDINGS",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012, COMMAD ; Conference date: 12-12-2012 Through 14-12-2012",

}

Tripathi, DK, Mao, H, Silva, D & Faraone, L 2012, Compositional and mechanical properties of PECVD silicon for thin-film optical applications. in COMMAD 2012 PROCEEDINGS. vol. 1, IEEE, Institute of Electrical and Electronics Engineers, United States, pp. 185-186, 2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012, Melbourne, VIC, Australia, 12/12/12.

TY - GEN

T1 - Compositional and mechanical properties of PECVD silicon for thin-film optical applications

AU - Tripathi, D.K.

AU - Mao, H.

AU - Silva, Dilusha

AU - Faraone, Lorenzo

PY - 2012

Y1 - 2012

M3 - Conference paper

SN - 9781467330459

VL - 1

SP - 185

EP - 186

BT - COMMAD 2012 PROCEEDINGS

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - United States

T2 - 2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012

Y2 - 12 December 2012 through 14 December 2012

ER -