Comparative study of surface acoustic wave based hydrogen sensors with: InOx/SiNx/36 YX LiTaO3 structure

A.C. Fechete, W. Wlodarski, K. Kalantar-Zadeh, A.S. Holland, Jarek Antoszewski, S. Kaciulis, L. Pandolfi

    Research output: Chapter in Book/Conference paperConference paperpeer-review

    Original languageEnglish
    Title of host publicationSPIE Proceeding - Microelectronics: Design, Technology, and Packaging II
    EditorsAlex J. Hariz
    Place of PublicationUnited States of America
    PublisherSPIE
    Pages603517-1 to 603517-8
    Volume6035
    EditionBrisbane, QLD, Australia
    ISBN (Print)0277786X
    DOIs
    Publication statusPublished - 2006
    EventComparative study of surface acoustic wave based hydrogen sensors with: InOx/SiNx/36 YX LiTaO3 structure - Brisbane, QLD, Australia
    Duration: 1 Jan 2006 → …

    Conference

    ConferenceComparative study of surface acoustic wave based hydrogen sensors with: InOx/SiNx/36 YX LiTaO3 structure
    Period1/01/06 → …

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