@inproceedings{e5e4529575194ce5b44adc03c2396896,
title = "Combined secondary and backscattered electron detector for Variable Pressure Scanning Electron Microscopes (VPSEM)",
author = "D. Drouin and V. Aimez and X. Hugon and Brendan Griffin and J. Beauvais and J. Beerens",
year = "2000",
language = "English",
isbn = "0 7503 0685 8",
volume = "none",
pages = "271--272",
editor = "D.B. Williams and R. Shimizu",
booktitle = "Second Conference of the International Union of Microbeam Analysis Societies",
publisher = "Institute of Physics Publishing",
address = "United States",
edition = "Kailua-Kona, Hawaii",
note = "Combined secondary and backscattered electron detector for Variable Pressure Scanning Electron Microscopes (VPSEM) ; Conference date: 01-01-2000",
}