Characterization of low-temperature bulk micromachining of silicon using an SF6/O2 inductively coupled plasma

F. Jiang, Adrian Keating, Mariusz Martyniuk, Krishnamachar Prasad, Lorenzo Faraone, John Dell

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)
Original languageEnglish
Pages (from-to)10 pages online
JournalJournal of Micromechanics and Microengineering
Issue number9
Publication statusPublished - 2012

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