Original language | English |
---|---|
Pages (from-to) | 10 pages online |
Journal | Journal of Micromechanics and Microengineering |
Volume | 22 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2012 |
Characterization of low-temperature bulk micromachining of silicon using an SF6/O2 inductively coupled plasma
F. Jiang, Adrian Keating, Mariusz Martyniuk, Krishnamachar Prasad, Lorenzo Faraone, John Dell
Research output: Contribution to journal › Article › peer-review
13
Citations
(Scopus)