@phdthesis{617bb8ebaabf4fed8ac1aefd9cf24794,
title = "Characterisation of thermal and thermoelectric properties of porous silicon thin films",
abstract = "The study is centered on investigating the thermal conductivity, specific heat capacity, and Seebeck coefficient of nanostructured porous silicon thin films. The 3ω method was employed to determine the thermal conductivity and specific heat capacity of both supported and suspended films. Meanwhile, the Seebeck coefficient of passivated porous silicon films was characterized using an electrically isolated voltage microprobe and AC heating. This research offers valuable insights for the design and optimization of thermal sensors using porous silicon material technology.",
keywords = "Porous silicon, Thermal properties, 3ω method, Thermoelectric properties, Thermal conductivity, Heat capacity, Seebeck coefficient, Surface micromachining",
author = "Sobhan Erfantalab",
year = "2023",
doi = "10.26182/qtxb-2f91",
language = "English",
school = "The University of Western Australia",
}