Band Switching Si-H Cluster Formation and Hydrogen Effusion upon thermal Annealing in Hydrogenated Amorphous Silica Thin Film

R. Ruther, John Livingstone, J. Dytlewski, D. Cohen

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)151-156
JournalThin Solid Films
Volume271
Publication statusPublished - 1996

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