Anchor profiles generated during microfluidic laminar flow assisted sacrificial layer release etching of MEMS microbeams

B.C. Cheah, A.J. Keating, John Dell

Research output: Chapter in Book/Conference paperConference paper

Original languageEnglish
Title of host publicationAPMC10 / ICONN2012 / ACMM22 CONFERENCE PROCEEDINGS
Place of PublicationAustralia
PublisherThe University of Western Australia
Pages889-1 - 889-2
Volume1
ISBN (Print)9781740522458
Publication statusPublished - 2012
EventAnchor profiles generated during microfluidic laminar flow assisted sacrificial layer release etching of MEMS microbeams - Perth Convention and Exhibition Centre, Perth, WA
Duration: 1 Jan 2012 → …

Conference

ConferenceAnchor profiles generated during microfluidic laminar flow assisted sacrificial layer release etching of MEMS microbeams
Period1/01/12 → …

Cite this

Cheah, B. C., Keating, A. J., & Dell, J. (2012). Anchor profiles generated during microfluidic laminar flow assisted sacrificial layer release etching of MEMS microbeams. In APMC10 / ICONN2012 / ACMM22 CONFERENCE PROCEEDINGS (Vol. 1, pp. 889-1 - 889-2). The University of Western Australia.