Abstract
Geometrical magnetoresistancc measurements can be used to obtain mobility and carrier concentration ill field effect transistor structures. While easily implemented, the accuracy of extracted parameters can be adversely affected by high parasitic resistances arising from ohmic contacts and/or ungated channel access regions. We present here a parameter extraction method for MODFET structures that accounts for parasitic elements, allowing accurate extraction of mobility-concentration profiles. To demonstrate the applicability of the method, and the deleterious effect of scries resistance. we apply the method to an Al0.35Ga0.65N/GaN MODFET and compare the results obtained to those obtained by neglecting the effect of parasitic contact resistance.
Original language | English |
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Title of host publication | COMMAD 2002 PROCEEDINGS (02EX 601) |
Editors | Michael Gal |
Place of Publication | Piscataway, New Jersey, USA |
Publisher | IEEE, Institute of Electrical and Electronics Engineers |
Pages | 393-396 |
Number of pages | 4 |
Volume | 2002-January |
ISBN (Print) | 0780375718 |
DOIs | |
Publication status | Published - 2002 |
Event | Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Sydney, Australia Duration: 11 Dec 2002 → 13 Dec 2002 |
Conference
Conference | Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 |
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Country/Territory | Australia |
City | Sydney |
Period | 11/12/02 → 13/12/02 |