An XYZ micromanipulator for precise positioning applications

M. Ghafarian, B. Shirinzadeh, A. Al-Jodah, T.K. Das, W. Wei, Y. Tian, D. Zhang

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


A three-degrees-of-freedom (3-DOF) monolithic compliant parallel micromanipulator with bridge-type displacement amplifier is presented in this paper. The research aims are to design a monolithic mechanism with capability of working in three translational axes and having a high resonant frequency. As a result of being precise in rotation, circular flexure hinges are adopted in the structure of the proposed mechanism and its corresponding mathematical modeling is investigated. A finite element analysis (FEA) model is developed to perform analysis and predict the behaviour of the proposed mechanism and the utilized amplifier, and thus establish the computational Jacobian, workspace and amplification ratio. The stress-strain relationship of the proposed mechanism is investigated by applying safety factor and the results are presented. Finally, an experimental study is conducted to evaluate the dynamic and tracking performances of the proposed flexure-based spatial mechanism. A feedback Proportional-Integral (PI) control methodology is implemented to enhance the mechanism positioning performance and eliminate hysteresis effect inherent in piezoelectric actuators. Based on the designed parameters, the proposed manipulator can have a large workspace, high band-width frequency, and fine tracking resolution along each working axes.
Original languageEnglish
Pages (from-to)53-63
Number of pages11
JournalJournal of Micro-Bio Robotics
Issue number1
Publication statusPublished - 1 Jun 2020
Externally publishedYes


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