An optically resonant position read-out system for MEMS gas sensors

Gino Putrino; Adrian Keating; Mariusz Martyniuk; Lorenzo Faraone; John Dell

doi:10.1117/12.2053135

An optically resonant position read-out system for MEMS gas sensors

Gino Putrino, Adrian Keating, Mariusz Martyniuk, Lorenzo Faraone, John Dell

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

1 Citation (Scopus)

Abstract

We present an experimental demonstration of a novel, integrated readout approach for measuring the suspended height of micro-electro-mechanical systems (MEMS) structures. The approach is based on creating a resonant optical cavity between the suspended MEMS structure and the substrate that the MEMS structure is anchored to. The resulting interferometric effect causes modulation of an optical laser signal which is strongly dependent on the position of the MEMS device. © 2014 SPIE.

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Place of Publication	USA
Publisher	SPIE
Pages	90832X
Volume	9083
ISBN (Print)	9781628410204
DOIs	https://doi.org/10.1117/12.2053135
Publication status	Published - 2014
Event	Micro- and Nanotechnology Sensors, Systems, and Applications VI - USA, Baltimore, United States Duration: 5 May 2014 → 9 May 2014 Conference number: 106857

Conference

Conference	Micro- and Nanotechnology Sensors, Systems, and Applications VI
Abbreviated title	SPIE 9083
Country/Territory	United States
City	Baltimore
Period	5/05/14 → 9/05/14

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10.1117/12.2053135

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title = "An optically resonant position read-out system for MEMS gas sensors",

abstract = "We present an experimental demonstration of a novel, integrated readout approach for measuring the suspended height of micro-electro-mechanical systems (MEMS) structures. The approach is based on creating a resonant optical cavity between the suspended MEMS structure and the substrate that the MEMS structure is anchored to. The resulting interferometric effect causes modulation of an optical laser signal which is strongly dependent on the position of the MEMS device. {\textcopyright} 2014 SPIE.",

author = "Gino Putrino and Adrian Keating and Mariusz Martyniuk and Lorenzo Faraone and John Dell",

year = "2014",

doi = "10.1117/12.2053135",

language = "English",

isbn = "9781628410204",

volume = "9083",

pages = "90832X",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

address = "United States",

note = "Micro- and Nanotechnology Sensors, Systems, and Applications VI, SPIE 9083 ; Conference date: 05-05-2014 Through 09-05-2014",

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Putrino, G, Keating, A , Martyniuk, M , Faraone, L & Dell, J 2014, An optically resonant position read-out system for MEMS gas sensors. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 9083, 90832X, SPIE, USA, pp. 90832X, Micro- and Nanotechnology Sensors, Systems, and Applications VI, Baltimore, United States, 5/05/14. https://doi.org/10.1117/12.2053135

TY - GEN

T1 - An optically resonant position read-out system for MEMS gas sensors

AU - Putrino, Gino

AU - Keating, Adrian

AU - Martyniuk, Mariusz

AU - Faraone, Lorenzo

AU - Dell, John

N1 - Conference code: 106857

PY - 2014

Y1 - 2014

N2 - We present an experimental demonstration of a novel, integrated readout approach for measuring the suspended height of micro-electro-mechanical systems (MEMS) structures. The approach is based on creating a resonant optical cavity between the suspended MEMS structure and the substrate that the MEMS structure is anchored to. The resulting interferometric effect causes modulation of an optical laser signal which is strongly dependent on the position of the MEMS device. © 2014 SPIE.

AB - We present an experimental demonstration of a novel, integrated readout approach for measuring the suspended height of micro-electro-mechanical systems (MEMS) structures. The approach is based on creating a resonant optical cavity between the suspended MEMS structure and the substrate that the MEMS structure is anchored to. The resulting interferometric effect causes modulation of an optical laser signal which is strongly dependent on the position of the MEMS device. © 2014 SPIE.

U2 - 10.1117/12.2053135

DO - 10.1117/12.2053135

M3 - Conference paper

SN - 9781628410204

VL - 9083

SP - 90832X

BT - Proceedings of SPIE - The International Society for Optical Engineering

PB - SPIE

CY - USA

T2 - Micro- and Nanotechnology Sensors, Systems, and Applications VI

Y2 - 5 May 2014 through 9 May 2014

ER -

An optically resonant position read-out system for MEMS gas sensors

Abstract

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