An optically resonant, grating-based technique for the sensitive detection of MEMS cantilever beam height

Gino Putrino; Mariusz Martyniuk; Adrian Keating; Lorenzo Faraone; John Dell

An optically resonant, grating-based technique for the sensitive detection of MEMS cantilever beam height

Gino Putrino, Mariusz Martyniuk, Adrian Keating, Lorenzo Faraone, John Dell

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Original language	English
Title of host publication	COMMAD 2012 PROCEEDINGS
Place of Publication	United States
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	115-116
Volume	1
ISBN (Print)	9781467330459
Publication status	Published - 2012
Event	2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012 - Melbourne, VIC, Australia Duration: 12 Dec 2012 → 14 Dec 2012

Conference

Conference	2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012
Abbreviated title	COMMAD
Country/Territory	Australia
City	Melbourne, VIC
Period	12/12/12 → 14/12/12

Cite this

@inproceedings{0ab6a43a36ac4e4282f31d834e05055d,

title = "An optically resonant, grating-based technique for the sensitive detection of MEMS cantilever beam height",

author = "Gino Putrino and Mariusz Martyniuk and Adrian Keating and Lorenzo Faraone and John Dell",

year = "2012",

language = "English",

isbn = "9781467330459",

volume = "1",

pages = "115--116",

booktitle = "COMMAD 2012 PROCEEDINGS",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012, COMMAD ; Conference date: 12-12-2012 Through 14-12-2012",

}

Putrino, G, Martyniuk, M , Keating, A , Faraone, L & Dell, J 2012, An optically resonant, grating-based technique for the sensitive detection of MEMS cantilever beam height. in COMMAD 2012 PROCEEDINGS. vol. 1, IEEE, Institute of Electrical and Electronics Engineers, United States, pp. 115-116, 2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012, Melbourne, VIC, Australia, 12/12/12.

An optically resonant, grating-based technique for the sensitive detection of MEMS cantilever beam height. / Putrino, Gino; Martyniuk, Mariusz ; Keating, Adrian et al.
COMMAD 2012 PROCEEDINGS. Vol. 1 United States: IEEE, Institute of Electrical and Electronics Engineers, 2012. p. 115-116.

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - An optically resonant, grating-based technique for the sensitive detection of MEMS cantilever beam height

AU - Putrino, Gino

AU - Martyniuk, Mariusz

AU - Keating, Adrian

AU - Faraone, Lorenzo

AU - Dell, John

PY - 2012

Y1 - 2012

M3 - Conference paper

SN - 9781467330459

VL - 1

SP - 115

EP - 116

BT - COMMAD 2012 PROCEEDINGS

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - United States

T2 - 2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012

Y2 - 12 December 2012 through 14 December 2012

ER -