An investigation of the optical and mechanical properties of ICPCVD silicon oxide and thermally evaporated MgF2 thin films for MEMS applications

    Research output: Contribution to conferenceAbstract

    Original languageEnglish
    Publication statusPublished - 2016
    Event International Conference on Nanoscience and Nanotechnology (ICONN 2016) - Canberra, Australia
    Duration: 7 Feb 201611 Feb 2016

    Conference

    Conference International Conference on Nanoscience and Nanotechnology (ICONN 2016)
    CountryAustralia
    CityCanberra
    Period7/02/1611/02/16

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