An investigation of the optical and mechanical properties of ICPCVD silicon oxide and thermally evaporated MgF2 thin films for MEMS applications

    Research output: Contribution to conferenceAbstract

    Original languageEnglish
    Publication statusPublished - 2016
    Event International Conference on Nanoscience and Nanotechnology (ICONN 2016) - Canberra, Australia
    Duration: 7 Feb 201611 Feb 2016

    Conference

    Conference International Conference on Nanoscience and Nanotechnology (ICONN 2016)
    CountryAustralia
    CityCanberra
    Period7/02/1611/02/16

    Cite this

    @conference{f18c35929f7f442099902d6ae9efc529,
    title = "An investigation of the optical and mechanical properties of ICPCVD silicon oxide and thermally evaporated MgF2 thin films for MEMS applications",
    author = "{Silva Castillo}, Jorge and Dhirendra Tripathi and Buddhika Silva and Mariusz Martyniuk and Jaroslaw Antoszewski and Lorenzo Faraone",
    year = "2016",
    language = "English",
    note = "International Conference on Nanoscience and Nanotechnology (ICONN 2016) ; Conference date: 07-02-2016 Through 11-02-2016",

    }

    Silva Castillo, J, Tripathi, D, Silva, B, Martyniuk, M, Antoszewski, J & Faraone, L 2016, 'An investigation of the optical and mechanical properties of ICPCVD silicon oxide and thermally evaporated MgF2 thin films for MEMS applications' International Conference on Nanoscience and Nanotechnology (ICONN 2016), Canberra, Australia, 7/02/16 - 11/02/16, .

    An investigation of the optical and mechanical properties of ICPCVD silicon oxide and thermally evaporated MgF2 thin films for MEMS applications. / Silva Castillo, Jorge; Tripathi, Dhirendra; Silva, Buddhika; Martyniuk, Mariusz; Antoszewski, Jaroslaw; Faraone, Lorenzo.

    2016. Abstract from International Conference on Nanoscience and Nanotechnology (ICONN 2016), Canberra, Australia.

    Research output: Contribution to conferenceAbstract

    TY - CONF

    T1 - An investigation of the optical and mechanical properties of ICPCVD silicon oxide and thermally evaporated MgF2 thin films for MEMS applications

    AU - Silva Castillo, Jorge

    AU - Tripathi, Dhirendra

    AU - Silva, Buddhika

    AU - Martyniuk, Mariusz

    AU - Antoszewski, Jaroslaw

    AU - Faraone, Lorenzo

    PY - 2016

    Y1 - 2016

    UR - http://ausnano.net/iconn2016/

    M3 - Abstract

    ER -