@conference{f18c35929f7f442099902d6ae9efc529,
title = "An investigation of the optical and mechanical properties of ICPCVD silicon oxide and thermally evaporated MgF2 thin films for MEMS applications",
author = "{Silva Castillo}, Jorge and Dhirendra Tripathi and Buddhika Silva and Mariusz Martyniuk and Jaroslaw Antoszewski and Lorenzo Faraone",
year = "2016",
language = "English",
note = " International Conference on Nanoscience and Nanotechnology (ICONN 2016) ; Conference date: 07-02-2016 Through 11-02-2016",
}