A WDM capable integrated optical readout of a MEMS sensor

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Pages (from-to)386-389
JournalProcedia Engineering
Volume47
DOIs
Publication statusPublished - 2012
Event26th European Conference on Solid-State Transducers - Krakow, Poland
Duration: 9 Sept 201212 Sept 2012
Conference number: 26

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