A Versatile Instrumentation System for MEMS-Based Device Optical Characterisation

Ramin Rafiei; Robert Basedow; Dilusha Silva; Jega Gurusamy; Jorge Silva Castillo; Dhirendra Tripathi; John Dell; Lorenzo Faraone

doi:10.1117/12.2034955

A Versatile Instrumentation System for MEMS-Based Device Optical Characterisation

Ramin Rafiei, Robert Basedow, Dilusha Silva, Jega Gurusamy, Jorge Silva Castillo, Dhirendra Tripathi, John Dell, Lorenzo Faraone

Graduate Research School

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

5 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of SPIE Micro/Nano Materials, Devices and Systems
Place of Publication	United States of America
Publisher	SPIE
Pages	89232V-1 - 89232V-9
Volume	8923
ISBN (Print)	0277786X13
DOIs	https://doi.org/10.1117/12.2034955
Publication status	Published - 2013
Event	SPIE Micro+Nano Materials, Devices, and Applications 2013 Conference - Melbourne, Australia Duration: 8 Dec 2013 → 11 Dec 2013

Conference

Conference	SPIE Micro+Nano Materials, Devices, and Applications 2013 Conference
Country/Territory	Australia
City	Melbourne
Period	8/12/13 → 11/12/13

Access to Document

10.1117/12.2034955

Cite this

@inproceedings{478d16bf2d4e4fb4a1dab236bab95f8f,

title = "A Versatile Instrumentation System for MEMS-Based Device Optical Characterisation",

author = "Ramin Rafiei and Robert Basedow and Dilusha Silva and Jega Gurusamy and {Silva Castillo}, Jorge and Dhirendra Tripathi and John Dell and Lorenzo Faraone",

year = "2013",

doi = "10.1117/12.2034955",

language = "English",

isbn = "0277786X13",

volume = "8923",

pages = "89232V--1 -- 89232V--9",

booktitle = "Proceedings of SPIE Micro/Nano Materials, Devices and Systems",

publisher = "SPIE",

address = "United States",

note = "SPIE Micro+Nano Materials, Devices, and Applications 2013 Conference ; Conference date: 08-12-2013 Through 11-12-2013",

}

Rafiei, R, Basedow, R, Silva, D , Gurusamy, J, Silva Castillo, J, Tripathi, D, Dell, J & Faraone, L 2013, A Versatile Instrumentation System for MEMS-Based Device Optical Characterisation. in Proceedings of SPIE Micro/Nano Materials, Devices and Systems. vol. 8923, SPIE, United States of America, pp. 89232V-1 - 89232V-9, SPIE Micro+Nano Materials, Devices, and Applications 2013 Conference, Melbourne, Victoria, Australia, 8/12/13. https://doi.org/10.1117/12.2034955

TY - GEN

T1 - A Versatile Instrumentation System for MEMS-Based Device Optical Characterisation

AU - Rafiei, Ramin

AU - Basedow, Robert

AU - Silva, Dilusha

AU - Gurusamy, Jega

AU - Silva Castillo, Jorge

AU - Tripathi, Dhirendra

AU - Dell, John

AU - Faraone, Lorenzo

PY - 2013

Y1 - 2013

U2 - 10.1117/12.2034955

DO - 10.1117/12.2034955

M3 - Conference paper

SN - 0277786X13

VL - 8923

SP - 89232V-1 - 89232V-9

BT - Proceedings of SPIE Micro/Nano Materials, Devices and Systems

PB - SPIE

CY - United States of America

T2 - SPIE Micro+Nano Materials, Devices, and Applications 2013 Conference

Y2 - 8 December 2013 through 11 December 2013

ER -