A torsional MEMS varactor with wide dynamic range and low actuation voltage

Venkatesh Chenniappan, N. Bhat, S. Pati, R. Pratap

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)
Original languageEnglish
Pages (from-to)480-487
JournalSENSORS AND ACTUATORS A-PHYSICAL
Volume121
Issue number2
DOIs
Publication statusPublished - 2005

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