A simplified fabrication process for HgCdTe photoconductive detectors using CH4/H2 reactive ion etching induced blocking contacts

E.P.G. Smith, K.J. Winchester, Charles Musca, John Dell, Lorenzo Faraone

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Original language	English
Pages (from-to)	455-462
Journal	Semiconductor Science and Technology
Volume	16
DOIs	https://doi.org/10.1088/0268-1242/16/6/306
Publication status	Published - 2001

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title = "A simplified fabrication process for HgCdTe photoconductive detectors using CH4/H2 reactive ion etching induced blocking contacts",

author = "E.P.G. Smith and K.J. Winchester and Charles Musca and John Dell and Lorenzo Faraone",

year = "2001",

doi = "10.1088/0268-1242/16/6/306",

language = "English",

volume = "16",

pages = "455--462",

journal = "Semiconductor Science and Technology",

issn = "0268-1242",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - A simplified fabrication process for HgCdTe photoconductive detectors using CH4/H2 reactive ion etching induced blocking contacts

AU - Smith, E.P.G.

AU - Winchester, K.J.

AU - Musca, Charles

AU - Dell, John

AU - Faraone, Lorenzo

PY - 2001

Y1 - 2001

U2 - 10.1088/0268-1242/16/6/306

DO - 10.1088/0268-1242/16/6/306

M3 - Article

SN - 0268-1242

VL - 16

SP - 455

EP - 462

JO - Semiconductor Science and Technology

JF - Semiconductor Science and Technology

ER -