A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications

Dhirendra Tripathi; Dilusha Silva; Ramin Rafiei; John Bumgarner; Mariusz Martyniuk; Thuyen Nguyen; Jarek Antoszewski; John Dell; Lorenzo Faraone

doi:10.1109/ICIInfS.2013.6731997

A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications

Dhirendra Tripathi, Dilusha Silva, Ramin Rafiei, John Bumgarner, Mariusz Martyniuk, Thuyen Nguyen, Jarek Antoszewski, John Dell, Lorenzo Faraone

Graduate Research School

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	2013 IEEE 8th International Conference on Industrial and Information Systems (ICIIS) Conference Proceedings
Place of Publication	United States of America
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	289-293
Volume	1
ISBN (Print)	9781479909100
DOIs	https://doi.org/10.1109/ICIInfS.2013.6731997
Publication status	Published - 2013
Event	8th IEEE International Conference on Industrial and Information Systems (ICIIS) 2013 - Peradeniya, Sri Lanka Duration: 17 Dec 2013 → 20 Dec 2013

Conference

Conference	8th IEEE International Conference on Industrial and Information Systems (ICIIS) 2013
Country/Territory	Sri Lanka
City	Peradeniya
Period	17/12/13 → 20/12/13

Access to Document

10.1109/ICIInfS.2013.6731997

Cite this

Tripathi, D., Silva, D., Rafiei, R., Bumgarner, J., Martyniuk, M., Nguyen, T., Antoszewski, J., Dell, J., & Faraone, L. (2013). A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications. In 2013 IEEE 8th International Conference on Industrial and Information Systems (ICIIS) Conference Proceedings (Vol. 1, pp. 289-293). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ICIInfS.2013.6731997

Tripathi, Dhirendra ; Silva, Dilusha ; Rafiei, Ramin et al. / A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications. 2013 IEEE 8th International Conference on Industrial and Information Systems (ICIIS) Conference Proceedings. Vol. 1 United States of America : IEEE, Institute of Electrical and Electronics Engineers, 2013. pp. 289-293

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title = "A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications",

author = "Dhirendra Tripathi and Dilusha Silva and Ramin Rafiei and John Bumgarner and Mariusz Martyniuk and Thuyen Nguyen and Jarek Antoszewski and John Dell and Lorenzo Faraone",

year = "2013",

doi = "10.1109/ICIInfS.2013.6731997",

language = "English",

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booktitle = "2013 IEEE 8th International Conference on Industrial and Information Systems (ICIIS) Conference Proceedings",

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note = "8th IEEE International Conference on Industrial and Information Systems (ICIIS) 2013 ; Conference date: 17-12-2013 Through 20-12-2013",

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Tripathi, D, Silva, D, Rafiei, R, Bumgarner, J, Martyniuk, M, Nguyen, T, Antoszewski, J , Dell, J & Faraone, L 2013, A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications. in 2013 IEEE 8th International Conference on Industrial and Information Systems (ICIIS) Conference Proceedings. vol. 1, IEEE, Institute of Electrical and Electronics Engineers, United States of America, pp. 289-293, 8th IEEE International Conference on Industrial and Information Systems (ICIIS) 2013, Peradeniya, Sri Lanka, 17/12/13. https://doi.org/10.1109/ICIInfS.2013.6731997

A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications. / Tripathi, Dhirendra; Silva, Dilusha; Rafiei, Ramin et al.
2013 IEEE 8th International Conference on Industrial and Information Systems (ICIIS) Conference Proceedings. Vol. 1 United States of America: IEEE, Institute of Electrical and Electronics Engineers, 2013. p. 289-293.

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

TY - GEN

T1 - A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications

AU - Tripathi, Dhirendra

AU - Silva, Dilusha

AU - Rafiei, Ramin

AU - Bumgarner, John

AU - Martyniuk, Mariusz

AU - Nguyen, Thuyen

AU - Antoszewski, Jarek

AU - Dell, John

AU - Faraone, Lorenzo

PY - 2013

Y1 - 2013

U2 - 10.1109/ICIInfS.2013.6731997

DO - 10.1109/ICIInfS.2013.6731997

M3 - Conference paper

SN - 9781479909100

VL - 1

SP - 289

EP - 293

BT - 2013 IEEE 8th International Conference on Industrial and Information Systems (ICIIS) Conference Proceedings

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - United States of America

T2 - 8th IEEE International Conference on Industrial and Information Systems (ICIIS) 2013

Y2 - 17 December 2013 through 20 December 2013

ER -

Tripathi D, Silva D, Rafiei R, Bumgarner J, Martyniuk M, Nguyen T et al. A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications. In 2013 IEEE 8th International Conference on Industrial and Information Systems (ICIIS) Conference Proceedings. Vol. 1. United States of America: IEEE, Institute of Electrical and Electronics Engineers. 2013. p. 289-293 doi: 10.1109/ICIInfS.2013.6731997