A new method of probing mechanical losses of coatings at cryogenic temperatures

Serge Galliou, Samuel Deléglise, Maxim Goryachev, Leonhard Neuhaus, Gianpietro Cagnoli, Salim Zerkani, Vincent Dolique, Jérémy Bon, Xavier Vacheret, Philippe Abbé, Laurent Pinard, Christophe Michel, Thibaut Karassouloff, Tristan Briant, Pierre François Cohadon, Antoine Heidmann, Michael E. Tobar, Roger Bourquin

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    3 Citations (Scopus)
    285 Downloads (Pure)


    A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coating nowadays. The approach is demonstrated for chromium, chromium/gold, and multilayer tantala/silica coatings. The Ta2O5/SiO2 coating has been found to exhibit a loss angle lower than 1.6 × 10-5 near 30 MHz at 4 K. The results are compared to the previous measurements.

    Original languageEnglish
    Article number123906
    JournalReview of Scientific Instruments
    Issue number12
    Publication statusPublished - 1 Dec 2016


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