A high precision position sensitive detection technology for Micro-Electro-Mechanical Systems (MEMS) based on an optical resonant cavity

    Research output: ThesisDoctoral Thesis

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    Abstract

    [Truncated abstract] This thesis examines the light transmission through the optical microcavity created in a gap between a diffraction grating etched into a silicon photonic waveguide and a free-standing MEMS structure. The optical microcavities studied are very small - having typical dimensions 12 μm long, 4μm high when designed for use with light at telecommunications wavelengths. The power transmitted through this cavity can be modulated by changing the height of the MEMS structure. Extremely small changes in the height of the microcavity result in very large changes in optical power, due to the optical resonance in the micorcavity.
    Original languageEnglish
    QualificationDoctor of Philosophy
    Publication statusUnpublished - 2013

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