Silicon-germanium-carbon - a novel opto-mechanic material for optical micro-electromechanical systems

Faraone, Lorenzo (Investigator 01)
Martyniuk, Mariusz (Investigator 02)
Liu, Yinong (Investigator 03)
Keating, Adrian (Investigator 04)

1 Article
1 Review article

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2018
Effect of thermal annealing on stress relaxation and crystallisation of ion beam sputtered amorphous Si_1-xGe_x thin films
Guo, F., Martyniuk, M., Silva, D., Liu, Y., Brookshire, K. & Faraone, L., 15 Oct 2018, In: Materials and Design. 156, p. 389-397 9 p.
Research output: Contribution to journal › Article › peer-review
9 Citations (Scopus)