SiGeC as structural material for micro-electromechanical systems

  • Martyniuk, Mariusz (Chief Investigator)
  • Dell, John (Chief Investigator)
  • Chenniappan, Venkatesh, (Chief Investigator)
  • Mao, Hai Feng, (Chief Investigator)
  • Lawn, Brian (Chief Investigator)
  • Huang, Han (Chief Investigator)
    StatusFinished
    Effective start/end date1/01/1231/12/12

    Funding

    • University of Western Australia