Integrated On-chip Force and Displacement Sensors for High-speed Atomic Force Microscopy of Ultimate Sensitivity

Project Details

StatusFinished
Effective start/end date1/01/1331/12/15

Funding

  • ARC Australian Research Council : A$650,617.00
  • Panorama Synergy Ltd: A$741,450.00
  • University of Newcastle: A$22,937.00