Characterization of Mechanical Properties of and Stress Gradient in Low-temperature Deposited Ultra-thin Films for Nano/Micro Electromechanical Systems.

  • Huang, Han (Chief Investigator)
  • Huang, Han (Chief Investigator)

    Project Details

    StatusFinished
    Effective start/end date1/01/05 → 31/12/05

    Funding

    • The University of Western Australia