• The University of Western Australia (M050), 35 Stirling Highway,

    6009 Perth

    Australia

  • 19 Citations
  • 3 h-Index
20142019
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Research Output 2014 2019

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Doctoral Thesis
2016
375 Downloads (Pure)

Micromachining Based On Porous Silicon

Sun, X., 2016, (Unpublished)

Research output: ThesisDoctoral Thesis

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micromachining
porous silicon
microbeams
tuning
silicon films