No photo of Xiao Sun

View Scopus Profile

Xiao Sun

Dr

  • The University of Western Australia (M050), 35 Stirling Highway,

    6009 Perth

    Australia

  • 19 Citations
  • 3 h-Index
20142019
If you made any changes in Pure these will be visible here soon.

Research Output 2014 2019

Filter
Article
2019

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Keating, A. & Sun, X., 21 Jan 2019, In : Advanced Materials Technologies. p. 1-7 7 p., 1800334.

Research output: Contribution to journal › Article

Open Access
Porous silicon
Carbonization
Oxidation
Propane
Lasers
2018
3 Citations (Scopus)

Micromachined microbeams made from porous silicon for dynamic and static mode sensing

Sun, X., Parish, G. & Keating, A., 1 Jan 2018, In : Sensors and Actuators, A: Physical. 269, p. 91-98 8 p.

Research output: Contribution to journal › Article

microbeams
Porous silicon
porous silicon
Silicon
Structural integrity
2017
5 Citations (Scopus)

Fabrication of uniform porosity, all-porous-silicon microstructures and stress/stress gradient control

Sun, X., Parish, G. & Keating, A., 21 Feb 2017, In : Journal of Micromechanics and Microengineering. 27, 4, 9 p., 044001.

Research output: Contribution to journal › Article

Porous silicon
Silicon
Porosity
Electrolytic polishing
Fabrication
2015
8 Citations (Scopus)

Stress control of porous silicon films for microelectromechanical systems

Sun, X., Keating, A. & Parish, G., 1 Dec 2015, In : Microporous and Mesoporous Materials. 218, p. 88-94 7 p.

Research output: Contribution to journal › Article

Porous silicon
silicon films
porous silicon
microelectromechanical systems
MEMS
2014
3 Citations (Scopus)
119 Downloads (Pure)

Released micromachined beams utilizing laterally uniform porosity porous silicon

Sun, X., Keating, A. & Parish, G., 22 Aug 2014, In : Nanoscale Research Letters. 9, 7 p.

Research output: Contribution to journal › Article

Open Access
File
microbeams
Porous silicon
Photolithography
photolithography
porous silicon