• The University of Western Australia (M050), 35 Stirling Highway,

    6009 Perth

    Australia

  • 19 Citations
  • 3 h-Index
20142019
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Research Output 2014 2019

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Article
2019

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Keating, A. & Sun, X., 21 Jan 2019, In : Advanced Materials Technologies. p. 1-7 7 p., 1800334.

Research output: Contribution to journalArticle

Open Access
Porous silicon
Carbonization
Oxidation
Propane
Lasers
2018
3 Citations (Scopus)
microbeams
Porous silicon
porous silicon
Silicon
Structural integrity
2017
5 Citations (Scopus)
Porous silicon
Silicon
Porosity
Electrolytic polishing
Fabrication
2015
8 Citations (Scopus)

Stress control of porous silicon films for microelectromechanical systems

Sun, X., Keating, A. & Parish, G., 1 Dec 2015, In : Microporous and Mesoporous Materials. 218, p. 88-94 7 p.

Research output: Contribution to journalArticle

Porous silicon
silicon films
porous silicon
microelectromechanical systems
MEMS
2014
3 Citations (Scopus)
102 Downloads (Pure)
Open Access
File
microbeams
Porous silicon
Photolithography
photolithography
porous silicon