• The University of Western Australia (M050), 35 Stirling Highway,

    6009 Perth

    Australia

  • 19 Citations
  • 3 h-Index
20142019
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Research Output 2014 2019

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Conference presentation/ephemera
2018

Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon

Afandi, Y., Sun, X., Parish, G. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

3 Downloads (Pure)

Nitrogen annealing effect on resistivity of porous silicon

Sun, X., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

File
porous silicon
nitrogen
electrical resistivity
annealing
silicon films

Pulsed heating effect on porous silicon and measurement of thermal time constant

Sun, X., Parish, G. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

porous silicon
time constant
heating
electric potential
silicon films

Released all-porous-silicon microstructure for spectrometer applications

Sun, X., Afandi, Y., Parish, G. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

porous silicon
spectrometers
microstructure
plane stress
silicon films
97 Downloads (Pure)

Resonance of Optically Driven Nano-porous Silicon Microbeams

Sun, X., Parish, G., Afandi, Y. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

File
microbeams
porous silicon
resonant frequencies
actuation

Using Current Density to Control Stress and Porosity in Porous Silicon Fabrication

Afandi, Y., Sun, X., Parish, G. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

Using Current Density to Control Stress and Porosity in Porous Silicon Fabrication

Afandi, Y., Sun, X., Parish, G. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

2016

Micromachining to achieve low stress in sacrificial layer free, all-porous silicon microstructures

Sun, X., Keating, A. & Parish, G., 2016.

Research output: Contribution to conferenceConference presentation/ephemera

Nano-porous silicon stress study during microstructure fabrication processes

Sun, X., Keating, A. & Parish, G., 2016.

Research output: Contribution to conferenceConference presentation/ephemera